FIELD: measurement technology, determination of roughness of supersmooth surfaces. SUBSTANCE: invention refers to determination of roughness of flat mirrors, polished substrates, etc. High precision of determination is ensured by registration of integral intensities of diffuse and mirror components of reflected light by photodetectors. Sounding beam of laser falls on surface of specimen in first focus of ellipsoid mirror. Diffuse component is focused by mirror on photodetector installed in its second focus and mirror component is brought out through hole on to another photodetector. EFFECT: high precision of determination of surface roughness. 1 dwg
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