FIELD: measurement technology; semiconductor transducers for measuring mechanical stresses. SUBSTANCE: integrated pressure transducer is assembled on single substrate and has membrane-style console with supporting base around it, as well as semiconductor member recording externally applied force. Semiconductor member is made in the form of photodiode and mounted on supporting base. Distance between semiconductor spatial charge area and edge of supporting base adjacent to loose end of console is shorter than diffusion length of semiconductor charge carriers. Passive light-emitting member such as phosphor droplet is provided on outer surface near console edge opposite photodiode; active light emitter such as light- emitting diode is mounted on outer surface of supporting base on other side of photodiode. Upper planar part of photodiode is shielded by light-proof coating. EFFECT: enhanced threshold sensitivity and resolution which enables using transducer for measuring blood pressure and pulse. 2 dwg
Title | Year | Author | Number |
---|---|---|---|
VARICAP BASED ON METAL-DIELECTRIC-SEMICONDUCTOR SYSTEM | 2012 |
|
RU2486633C1 |
MDS-VARICAP | 2010 |
|
RU2447541C1 |
ADAPTIVE SENSOR BASED ON SENSITIVE FIELD DEVICE | 2012 |
|
RU2511203C2 |
METHOD FOR DEPOSITING NICKEL-PHOSPHORUS COATING ON METAL SURFACES | 2014 |
|
RU2572914C2 |
METHOD OF FORMING LIGHT-ABSORBING COATING | 2014 |
|
RU2570715C2 |
METHOD FOR MANUFACTURING OF MOS INTEGRAL CIRCUITS | 1995 |
|
RU2105382C1 |
METHOD OF FORMING LIGHT-ABSORBING COATING | 2014 |
|
RU2566905C1 |
PROCESS OF MANUFACTURE OF MIS INTEGRATED CIRCUITS | 1995 |
|
RU2099817C1 |
PHOTODETECTOR | 1986 |
|
SU1840703A1 |
OPTICAL MODULATOR OF COMPLEX WAVE SIGNALS | 2006 |
|
RU2324961C1 |
Authors
Dates
2002-07-27—Published
2001-06-21—Filed