SYSTEM OF MULTIROD ELECTRODES WITH NANO- AND SUBMICROMETER DIAMETERS FOR ELECTRIC EROSION TREATMENT OF SURFACE OF SOLID BODIES Russian patent published in 2002 - IPC

FIELD: electric erosion treatment, namely,, special designation rod electrodes, possibly in different branches of electronic machine engineering. SUBSTANCE: electrode system is designed for forming discrete zones for alloying high-temperature superconductors and for applying metallic nanoclusters on surfaces of semiconductors and dielectrics and for modifying properties of thin-film articles. Metallic replicas of trace membranes are used as multirod electrodes of nano- and submicrometer diameters for electric erosion treatment of surfaces of solid bodies. EFFECT: enhanced efficiency of electric erosion treatment of large and complex contour surfaces (possibly inner surfaces) of solid bodies, reduced power of equipment. 3 dwg