PROCESS OF MANUFACTURE OF METAL REPLICA FOR ANALYSIS OF NANOMETRIC DUCTS IN TRACKING MEMBRANES Russian patent published in 1998 - IPC

Abstract RU 2115915 C1

FIELD: examination and analysis of materials by determination of their physical properties. SUBSTANCE: invention refers to examination of parameters of ducts of nanometric dimensions in tracking membranes, to manufacture of objects from tracking membranes for analysis with the use of electron microscopy. Metal contact layer is formed on surface of tracking membrane, electrochemical precipitation of metal precipitate is performed in ducts of tracking membrane, then massive backing is formed by electroplating and chemical dissolution of tracking membrane is carried out. Electrochemical precipitation of metal precipitate in ducts of tracking membrane is conducted directly on surface of foil-backing bent spherically through tracking membrane pressed against it. EFFECT: expanded application field, improved productivity of process. 2 cl, 1 dwg

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RU 2 115 915 C1

Authors

Dmitriev S.N.

Reutov V.F.

Sokhatskij A.S.

Dates

1998-07-20Published

1996-07-23Filed