METHOD OF PREPARING SAMPLE FOR POROMETRY OF THROUGH NANOMETRIC-SIZED CHANNELS IN SOLID-BODY MEMBRANES BY MEANS OF TRANSLUCENT ELECTRON MICROSCOPY Russian patent published in 2008 - IPC B82B3/00 

FIELD: inspection and analysis of materials.

SUBSTANCE: method can be used for determination of physical properties of materials and of their structure. Method of preparation of samples for poroscopy of through nanometric-sized channels in solid-body membranes by means of translucent electron microscopy is based upon electroplating deposition of metal deposit in through etched channels of membrane. Membrane is tightly pressed under vacuum against edge surface of substrate-cathode; foil or wire is used as substrate-cathode. Electroplating deposition process is carried out until "fungi" form onto surface of membrane. After that membrane is dissolved or narrow strip is cut out of membrane-nanometric wires composition. Narrow strip is poured with thin layer of glue, which layer is disposed in perpendicular to cut-out strip. Then material of membrane is etched till through slot is formed in layer of glue; nanometric wires are built in through slot. As a result, objects for qualitative and quantitative analysis of parameters of nanometric-sized channels are produced, for example, geometric profile of etched nanometric-sized channels along their total length, especially in hoisted areas.

EFFECT: improved efficiency of operation; higher quality of objects.

4 cl, 2 dwg