PROCESS OF MANUFACTURE OF SUBMICRON TUBULAR METAL REPLICAS WITH TRACK MEMBRANES Russian patent published in 2000 - IPC

Abstract RU 2156328 C1

FIELD: manufacture of monocrystalline structure of complicated geometric shape, micromechanics, microengineering. SUBSTANCE: process includes galvanic deposition of metal in ducts of mask in the form of track membrane with metal layer sputtered on one of its surfaces. Electrochemical cell is divided by track membrane into upper and lower spaces. Galvanic deposition of metal in ducts of track membrane is conducted with flow of electrolyte through ducts of membrane from upper space of cell to lower one. At final stage of formation of tubes potential positive with reference to negative potential on electrode in lower space of electrochemical cell is periodically supplied to sputtered metal layer on track membrane. EFFECT: enhanced efficiency of manufacture of microtubes of various metals and alloys, enlarged linear dimensions of microtubes. 2 dwg

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RU 2 156 328 C1

Authors

Reutov V.F.

Dmitriev S.N.

Dates

2000-09-20Published

1998-12-25Filed