FIELD: manufacture of semiconductor devices. SUBSTANCE: quartz glass part has rough surface formed by embossed irregular-shape structural components placed between first high plane and second depressed one; plurality of structural components mainly have flat surface in first plane surrounded on all sides mainly with side surfaces like edges passing between first and second planes. Mean depth Ra of profile irregularities amounts to (0.1-10) mcm and degree of projection of structural members onto first plane is in average between 30 and 180 mcm. EFFECT: improved suitability of part surface roughness for adhesion to layers deposited from gas phase; enhanced service life of part. 7 cl, 3 dwg
