FIELD: capacitance-type fingerprint transducers. SUBSTANCE: component with passivating layer has at least two double passivating layers, uppermost one of uniform thickness being applied to leveled upper surface of underlayer. Each double passivating layer has two layers of different insulating materials such as silicon oxide and silicon nitride which ensures reliable passivation. EFFECT: enlarged functional capabilities. 4 cl, 2 dwg
Authors
Dates
2002-12-20—Published
1999-07-01—Filed