FIELD: manufacture of semiconductor devices. SUBSTANCE: high-quality non-monocrystal silicon alloy material incorporates regions of silicon alloy middle-order material but does not include volume percent required to form percolation channel inside material. Remaining part of material is either amorphous or mixture of amorphous and monocrystal materials. EFFECT: provision for checking local order of semiconductor that has useful properties differing from amorphous and crystalline states. 17 cl, 7 dwg
