METHOD OF PRODUCING HEAT-TREATED COATED ARTICLE WITH TRANSPARENT COATING OF CONDUCTING OXIDE FOR USE IN SEMICONDUCTOR DEVICE Russian patent published in 2011 - IPC C03C17/245 

FIELD: technological processes.

SUBSTANCE: invention relates to making an article with a conducting oxide coating and can be used in making photovoltaic devices. According to the disclosed method, a film of amorphous metal oxide is sputtered onto a glass substrate. The glass substrate with the amorphous film and semiconductor film deposited on it are then subjected to heat treatment at temperature of at least 200°C. Heat treatment causes conversion of the amorphous film into a film based on a crystalline transparent oxide. Heat used in heat treatment causes the amorphous film to return to a crystalline film state, which increases transmission of visible light and/or endows the film with electroconductivity. The amorphous metal oxide used in the method can be tin oxide doped with antimony (SnO_x:Sb) or zinc oxide doped with aluminium or another concomitant impurity, for example ZnAlO_x:Ag.

EFFECT: design of a glass substrate with a coating, having sufficient conductivity for use in photovoltaic devices.

15 cl, 2 dwg