SOLAR CELL MANUFACTURING PROCESS Russian patent published in 2003 - IPC

FIELD: manufacture of optoelectronic devices including photoelectric solar cells. SUBSTANCE: process for manufacturing n⁺-p-p⁺-structure solar cells includes following operations: covering of rear side of silicon wafer with boron-doped p⁺ layer by concurrent diffusion of boron and phosphor during heat treatment of silicon wafer with its rear and face sides covered with boron-silicate and phosphor-silicate films, respectively; removal of silicon layer and texturing on face side during single process; covering of p⁺ layer obtained on rear side of silicon wafer with shielding layer concurrently with phosphor diffusion to obtain n⁺ layer on face side of silicon wafer; formation of phosphor-doped n⁺- layer on face side of silicon wafer by phosphor diffusion from applied source; removal of mentioned shielding layer, and formation of contacts. Proposed process ensures minimum 90% yield and cell efficiency up to 17%. EFFECT: enhanced yield of process and efficiency of solar cell. 1 cl, 1 dwg