METHOD OF MAKING SOLAR CELL WITH DOUBLE-SIDED SENSITIVITY Russian patent published in 2012 - IPC H01L31/18 

FIELD: physics.

SUBSTANCE: method involves depositing a phosphorus-containing 3 and a boron-containing 2 film, respectively, onto a first and a second opposite surface of a silicon substrate 1; simultaneous diffusion of phosphorus and boron from the corresponding films in the surface of the first and second sides of the substrate 1, respectively, at high temperature; removing the surface layer 4 which is doped with phosphorus, while simultaneously forming a textured surface on the first side of the substrate 1; forming a phosphorus-doped layer 7 on the textured surface and forming a contact system 8. Content of phosphorus in the phosphorus-containing film 3 is selected such that concentration of phosphorus on all areas of the surface coated with the phosphorus-containing film 3 is higher than concentration of boron on these areas after diffusion.

EFFECT: high efficiency of solar cells owing to elimination of the layer overlapping effect.

7 cl, 2 dwg, 3 tbl, 2 ex