FIELD: manufacture of nanocrystalline powders. SUBSTANCE: method for making nanocrystalline powders of chemical compounds on base of solid-phase material with crystalline structure comprises steps of preparing initial solid-phase material; heating it in reactor with medium containing other components of chemical compound until temperature of generating said chemical compound. According to invention chemical compound on base of solid phase material with crystalline structure is formed in reactor at presence of gaseous hydrogen fluoride during the whole process of generating said chemical compound. EFFECT: elimination of using complex high-cost equipment with large energy consumption. 8 cl, 5 ex
