FIELD: chemical technology. SUBSTANCE: invention relates to preparing hydrogen chloride used for synthesis of trichlorosilane with semiconductive purity. Method for preparing hydrogen chloride is carried out by combustion of gaseous hydrogen and chlorine in burner flame. At initial period reaction is initiated due to feeding mixture of monosilane with inert gas as ignition mixture and kindling reactor is carried out by step process: firstly, with consumption of hydrogen 5-12 vol.% of nominal level in air medium for 2-10 min under atmosphere pressure and the following ceasing feeding ignition mixture and then with consumption of parent reagents 15-30 vol. % of nominal level under working pressure for 20-60 min and then nominal consumption of reagents is established. The mole ratio of chlorine to hydrogen is maintained in the range = (0.9-0.95):1.0 and content of monosilane in mixture with inert gas is maintained in the ranges 5-12 vol.%. Invention provides the enhancement of safety of process and preparing product useful for production of trichlorosilane with semiconductive quality. EFFECT: improved preparing method. 3 cl, 1 tbl
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Authors
Dates
2003-11-27—Published
2002-04-24—Filed