METHOD FOR PRODUCTION OF HIGH-PURITY POLYCRYSTALLINE SILICON Russian patent published in 1997 - IPC

Abstract RU 2078034 C1

FIELD: silicon production. SUBSTANCE: alkali or alkali-earth metal silicofluoride is thermally decomposed to yield silicon tetrafluoride, which is subjected to absorption purification in organic solution followed by converting silicon tetrafluoride into silicon dioxide and then into silicon monoxide. The latter is reduced with hydrogen at 500-600 C into polycrystalline silicon. EFFECT: increased yield and improved environmental condition.

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RU 2 078 034 C1

Authors

Karelin V.A.

Dates

1997-04-27Published

1993-01-19Filed