ION-RADIATION UNIT FOR SMOOTHING-OUT SURFACES OF OXIDE MATERIALS Russian patent published in 2003 - IPC

FIELD: nuclear engineering; smoothing-out surfaces of oxide materials. SUBSTANCE: proposed unit includes vacuum chamber where ion source, space charge compensator, target made from oxide material similar with material of backing and heater are arranged. Backing and target are opposite ion source. Unit is also provided with separator consisting of external and internal current- conducting tubes which are bent over arcs and one tube is inserted in other at increase of bending radii from point of internal contact near space charge compensator. On side of minimum bending radius of each tube, slotted cuts are made in plane of their symmetry. Target is fitted at end face of internal tube of ion separator. Backing is fitted at end faces of external and internal tubes. Proposed unit makes it possible to smooth-out local sections of surfaces of oxide materials and apply belt-type and spot coats on backing. EFFECT: enhanced efficiency. 3 dwg