CONVERTER OF VACUUM ULTRAVIOLET RADIATION INTO RADIATION OF VISIBLE RANGE IN FORM OF AMORPHOUS SILICON OXIDE SiO FILM ON SILICON SUBSTRATE Russian patent published in 2014 - IPC C23C14/48 C23C14/58 H01L33/26 C09K11/59 

FIELD: chemistry.

SUBSTANCE: invention relates to luminescent materials - converters of vacuum ultraviolet radiation into radiation of a visible range, made in the form of an amorphous silicon oxide SiO_X film on a silicon substrate, intended for the creation of functional elements of photonic devices of the new generation, as well as for control of hard ultraviolet radiation in vacuum technological processes. The amorphous silicon oxide SiO_X film of the converter is 20÷70 nm thick. The content of oxygen ions on the said film corresponds to the quantity at which the stoichiometric coefficient X is within the range from 2.01 to 2.45.

EFFECT: increased intensity of red converter radiation, red luminescence is provided with the preservation of conversion of vacuum ultraviolet radiation into visible radiation.

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