FIELD: switch-mode power supplies for reactor chambers of plasma chemical reactors.
SUBSTANCE: pulse modulator has power supply designed for operation into variable-capacitance load at pulse generation instant and controlled electronic switching members with flat control characteristic, primary energy storage capacitor with partial discharge of stored energy, and secondary energy storage inductor. Modulator shapes bursts of variable-polarity Gaussian pulses across load. Leading and training edge shaping processes are resonance-tuned at frequency of storage inductor and load capacitor reactive parameters.
EFFECT: enhanced reliability of dc-to-nanosecond-pulse voltage conversion at any kind of abnormal breakdown in load and its parameter change.
3 cl, 7 dwg
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MULTI-CHANNEL BOOST SWITCHING DC VOLTAGE REGULATOR | 2022 |
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STABILIZED D-C VOLTAGE INVERTER | 0 |
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PULSE SHAPER | 0 |
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Authors
Dates
2004-08-20—Published
2003-03-31—Filed