FIELD: vacuum engineering.
SUBSTANCE: proposed method intended for damping vibrations in vacuum installations using various rotary evacuating devices under laboratory conditions depends on use of bellows disposed between vacuum installation chamber and rotary evacuating device. The latter is installed directly under working chamber and connected thereto from bottom through vibration damping bellows. Gases are evacuated from chamber at working pressures while holding rotary evacuating device in suspended condition and moving the latter along vertical axis within range limited by bellows elastic deformation conditions. In the process rarefaction force applied to bottom part of bellows is compensated for by rotary evacuating device gravity and additional balancing thrust applied thereto.
EFFECT: enhanced efficiency of damping vibrations transferred to working chamber by rotary evacuating device.
1 cl, 1 dwg
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