FIELD: vacuum engineering; vibration damping in vacuum units using various rotary evacuating devices under laboratory conditions.
SUBSTANCE: proposed device has vibration damping bellows with evacuating apparatus on end loosely suspended from vacuum chamber. Disposed under evacuating apparatus are platform and balancing weight affording pump hanging and its movement along vertical axis under working pressure conditions within bellows elastic deformation limits. In addition, evacuating apparatus has vibration damping spring and second balancing weight loosely suspended by means of this spring from evacuating apparatus base. Vibration damping spring and its weight are disposed along axis crossing gravity center of evacuating apparatus; parameters of vibration damping spring and its weight should meet following condition: C = mω2, where C is vibration damping spring stiffness; m is weight mass; ω is cyclic velocity of evacuating apparatus rotor.
EFFECT: enhanced efficiency of vibration damping.
3 cl, 1 dwg
Authors
Dates
2006-09-27—Published
2004-10-25—Filed