FIELD: apparatus for spraying or atomizing liquids or other fluent materials, particularly for generating radiation in super-ultraviolet spectrum range, used, for instance, in lithography.
SUBSTANCE: method involves ejecting high-pressure liquid 4 into nozzle 10 having small diameter and opened into vacuum chamber; generating radiation 42 by focusing laser beam 36 on dense fog 23.
EFFECT: increased efficiency and reliability.
10 cl, 3 dwg
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