HIGH-BRIGHTNESS SHORT-WAVE RADIATION SOURCE Russian patent published in 2019 - IPC H01J35/02 

FIELD: physics.

SUBSTANCE: invention is aimed at improvement of high-brightness radiation sources in the wavelength range from 0.01 to 20 nm due to deep suppression of contaminants on the short-wave radiation beam path. Objective is achieved by using energy beam (11) focused on target (4), which is a layer of molten metal formed by centrifugal force on rotary target assembly (2) facing circular surface of annular chute, and use of means of suppressing contaminants on the path of short-wave radiation beam (13). Highly efficient suppression of impurities is achieved by rotation of target with high, more than 20 m/s, linear speed, output of short-wave radiation beam (13) in direction different from that of predominant output of microdrop fraction of contaminants, installation of replaceable membrane (20) of carbon nanotubes on path of beam of short-wave radiation. Short-wave radiation is generated either by laser plasma of the target material or in form of X-ray radiation when the target is bombarded with an electron beam.

EFFECT: creation of the most high-brightness sources of extreme ultraviolet (EUV) and X-ray radiation with high service life and convenience of operation.

12 cl, 9 dwg