MULTIPLICATIVE MICROELECTRONIC PRESSURE TRANSDUCER Russian patent published in 2005 - IPC

FIELD: measurement technology.

SUBSTANCE: device can be used for measuring non-electric parameters. Multiplicative microelectronic pressure transducer has semiconductor chip with flexible member made in form of a protrusion on the top of chip, at least one sensitive element formed in protrusion, concentrator which area exceed concentrator's area. Concentrator is connected with surface of protrusion and is intended for converting pressure to be measured into force acting on flexible element. Protrusion is made in form of a closed frame. Rigid concentrator is made in form of solid plate. Surface of protrusion and concentrator has vacuum-tight and rigid connection. According to the other variant the chip has two protrusions located on its surface in form of frames with similar sizes. One of frames is closed and the other one has at least one gap. Sensitive element is made of four resistance strain gauges formed in pairs inside all mentioned protrusions. Concentrator is made in form of a solid-state plate, which is connected rigidly and vacuum-tightly with surface of protrusion made in form of closed frame. Pressure transducer is provided with second solid-state plate that is identical in design to concentrator and connected rigidly with surface of protrusion that has at least one gap.

EFFECT: improved precision of measurement.

2 cl, 18 dwg