DOUBLE BEAMED ACCELEROMETER Russian patent published in 2008 - IPC G01P15/12 

FIELD: measuring techniques; semiconductor devices.

SUBSTANCE: integrated silicon piezo-accelerometer consists of two inertial masses, identically located, relative to the direction of motion with acceleration, and identically located like-directed pairs of resistance strain gauges on two concentrators which connect the mass to the fixed part. The quality factor increases due to two factors. Firstly, sensitivity of the resistance strain gauges increases when using silicon wafers oriented in plane (110) and resistors whose axis is directed in the crystallographic direction (111) with high sensitivity. Secondly, due to increase of natural frequency of oscillation of the pendulum suspension with an elastic connection between two inertial masses. Initial unbalance is eliminated due to the fact that the resistance strain gauges are identically located on the concentrators.

EFFECT: conversion of mechanical effects into electrical signals; determination of acceleration and impact forces.

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