SENSITIVE ELEMENT OF PRESSURE AND TEMPERATURE TRANSDUCER Russian patent published in 2017 - IPC H01L29/84 

FIELD: measuring equipment.

SUBSTANCE: invention can be used for production of small-size semiconductor converters of pressure and temperature. This invention consists in that sensitive element of pressure and temperature converter comprises plate of silicon with metal-coated contact pads, switching area and thinned part in form of membrane, on which composite strain gauges are placed, arranged radially and tangentially relative to membrane; thermal resistor, wherein strain gauges and thermal resistor are connected via switching area in bridge circuit, thermal resistor is composite at least of two parts, strain gauges are made at least of two series-connected parts, wherein components of strain gauges are connected to each other and component parts of thermal resistor are connected to each other via switching area, wherein switching areas are alloyed areas with p+ type of conductivity.

EFFECT: technical result is design of sensitive element of converter with high sensitivity and reliability.

4 cl, 3 dwg