FIELD: optical engineering.
SUBSTANCE: spots of exposure are created onto surface of material being sensitive to the radiation used by means of array or composed irradiation array. Number of arrays is N, where N≥2. Sizes of array or composed array of radiators are equal or exceed sizes of preset image. Diameter d of radiation flux at output of any radiator is lees than 100 nm. Preset image is got by means of step-by-step motion of array and/or material being sensitive to used radiation for distances, which do not exceed maximal sizes between axes of adjacent radiators having step being shorter than d but with step being equal to 0,01 nm to 1 nm. Light-guide array can be used as array of radiators, which light-guides are connected with source or sources of radiation and made of fiber-optic light-guides having ends being thinned or made in form of microscopic cones of material being transparent for used radiation. Array can also be made in form of autoemission elements array.
EFFECT: high resolution; simplified design.
31 cl, 2 dwg
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Authors
Dates
2005-04-27—Published
2004-04-12—Filed