FIELD: mechanical engineering.
SUBSTANCE: method and device with forming of even-signal basic line are based on direct measurements method different from zero, error signal is recorded having linear dependence from displacement value, which in turn depends on all measuring distances only from normal error signal with constant proportionality coefficient. This is achieved due to mounting of bright elongated lighting system before input pupils and also photo-detecting system with square receiver of square diaphragms of different sizes, realization of recording of distribution of radiation level in focus plane of receiver system and normalizing error signal to basic level.
EFFECT: higher precision and sensitivity.
2 cl, 3 dwg
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