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2 256 605

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C1

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IPC

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Application

2004114619/15, 2004-05-14

(24)

Start date

2004-05-14

(22)

Actual filing date

2004-05-14

(45)

Published

2005-07-20

(72)

Inventor

Alekseev Ju.I.Pashkevich D.S.Mukhortov D.A.Petrov V.B.

(73)

Holder

Obshchestvo S Ogranichennoj Otvetstvennost'Ju

METHOD FOR PREPARING NITROGEN TRIFLUORIDE Russian patent published in 2005 - IPC

Abstract RU 2256605 C1

FIELD: inorganic chemistry, chemical technology.

SUBSTANCE: invention relates to a method for preparing nitrogen trifluoride of the formula NF3. Method for preparing nitrogen trifluoride is carried out from elemental fluorine and ammonia in melt medium of ammonium salts acid fluorides of the general formula: NH4H1-xFx wherein x = 2.0-3.0 at temperature 120-160°C and under pressure 0.1-0.55 MPa. Synthesis of nitrogen trifluoride is carried out for two successive stages - amination reaction of acid ammonium bifluoride melt to the complete binding gaseous ammonia followed by fluorination reaction of acid ammonium bifluoride. Both stages are carried out in structurally separated zones. Invention provides enhancing specific output of the reaction volume and safety of the process. Nitrogen trifluoride is used in many branches of chemical and electronic industry, namely: in chemical industry as fluorinating agents, as oxidants of high-caloric fuels in rocket technique, in electronic industry: for treatment of chambers for chemical and vapor-phase precipitation, for dry etching large integral schemes and so on.

EFFECT: improved method for preparing.

3 tbl, 3 dwg, 3 ex

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RU 2 256 605 C1

Authors

Alekseev Ju.I.

Pashkevich D.S.

Mukhortov D.A.

Petrov V.B.

Dates

2005-07-20—Published

2004-05-14—Filed

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