FIELD: ion-plasma material treatment technologies.
SUBSTANCE: proposed device for ion-plasma treatment of solid body surface has high-frequency oscillator, reactor, and magnetic system. High-density ion stream is produced and directed to surface being treated by means of magnetic system that has two annular magnets (top and bottom ones) whose unlike-polarity magnetic poles are closed through magnetic circuit outside of reactor. Magnetic system builds up magnetic field within reactor whose contour of magnetic lines of force is shaped due to magnetic system poles not closed with magnetic circuit, lower component of magnetic field formed by top annular magnet disposed close to HF energy input assembly being used only.
EFFECT: enhanced degree of plasma ionization, facilitated production of directed stream of high-density ions.
1 cl, 2 dwg
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