THERMAL CHAMBER FOR TESTING ELECTRONIC PRODUCTS Russian patent published in 2006 - IPC H01L21/66 

FIELD: technology for climatic testing of semiconductor equipment with concurrent measurements of their electric parameters.

SUBSTANCE: thermal chamber for testing electronic products has casing, wherein working chamber is positioned, ventilator, mounted in working chamber between air-ejecting and forcing branch pipes, assembly for cleaning recirculation air, mounted in forcing branch pipe and made in form of coaxially connected narrowing diffuser with inner grooves and broadening nozzle, wherein drying device is positioned in form of reservoir, meant for filling with absorbing substance, while ventilator is provided with drive with speed adjuster in form of block of powder electromagnetic sleeves, and in working chamber pressure indicator is mounted, connected to pressure adjuster, which has comparison block, set-point block, while comparison block is connected to input of electronic amplifier, equipped with non-linear check connection block, and also, output of electronic amplifier is connected to input of magnetic amplifier with rectifier, which at its output is connected to speed adjuster in form of block of powder electromagnetic sleeves of ventilator drive.

EFFECT: increased trustworthiness of results of testing of electronic products by supporting normal climatic characteristics of recirculation air due to control over its pressure for prolonged effect on completed semiconductor devices in thermal chamber.

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