HEAT CHAMBER FOR TESTING OF ELECTRONIC ITEMS Russian patent published in 2009 - IPC H01L21/66 

FIELD: physics, conductors.

SUBSTANCE: invention is related to devices used in semiconductor production for kinematic tests of finished semiconductor devices. In heat chamber for testing of electronic items, comprising jacket, in which working chamber is installed, fan installed in working chamber between exhaust and plenum nozzles, unit of recirculation air cleaning installed in plenum nozzle and arranged in the form of coaxially joined narrowing diffuser from bimetal with internal grooves, cavities of which have profile in the form of dovetail, and expanding nozzle with drying device filled with adsorbing substance, in drying device there are horizontally installed perforated zigzag-shaped partitions, which create confusers and diffusers that alternate in staggered order.

EFFECT: improved results of electronic items testing by maintenance of rated quality of recirculation air drying.

2 dwg