HEAT-CHAMBER FOR TESTING ELECTRONIC DEVICES Russian patent published in 2002 - IPC

FIELD: semiconductor engineering; environmental tests of semiconductor devices involving measurement of their electrical characteristics. SUBSTANCE: heat-chamber has case accommodating working chamber, fan, circulating air cleaning unit made in the form of coaxially joined contracting diffuser with dovetail-section inner grooves and expanding nozzle with drier that occupies its entire outlet area. Inner surface of contracting diffuser bears annular groove closed with resilient rubber ring provided with radial holes. Proposed heat chamber is useful in particular for long-time tests of electronic devices when accumulated solid particles fall out of diffuser grooves to moving air flow and clog inner grid of drier. EFFECT: enhanced degree of circulating air cleaning. 1 cl, 5 dwg