FIELD: environmental test facilities for finished semiconductor devices. SUBSTANCE: proposed heat-chamber for testing electronic devices has shell accommodating working chamber, fan mounted in the latter between exhaust and delivery pipe connections, circulating air cleaning unit mounted in delivery pipe connection and made in the form of coaxially joined converging diffuser with inner slots and diverging nozzle, and drying device filled with adsorbing material. Converging diffuser is made of bimetal and its inner slots are of dovetail-like outline. Measures are taken to avoid ingress of solid, drop-like, and vaporous impurities in devices under test. EFFECT: enhanced reliability of test results; high effectiveness of circulating air drying. 3 dwg
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Authors
Dates
2003-03-20—Published
2001-04-09—Filed