DEVICE TO CHECK THE DEPTH OF VACUUM DEPOSITED COATINGS Russian patent published in 2006 - IPC C23C14/54 

FIELD: instrument making industry; electronic industry; mechanical engineering; production of devices to control the processes of the vacuum deposition of coatings.

SUBSTANCE: the invention is pertaining to the device used for control over the processes of the vacuum deposition of the coatings, in particular, to the device for the check of the coatings and may be used in instrument making industry, electronic industry, mechanical engineering to control the depth of the vacuum deposited coatings. The device contains at least one reference sample, the regulated source of power, the reference sample heater connected to the output of the regulated source of power, the reference sample temperature converter, the block of registration of the depth of the coating and the transformer of the depth of the coating of the reference sample. The indicated transformer contains the oscillations generating system connected to the unit of registration of the depth of the coatings, the vibrating system and is made in the form of the tonometer containing at least two branches. The reference sample is anchored on the each branch of the tonometer. Such a design of the device ensures the increased accuracy of the control and the decreased minimal controlled depth of the coatings due to reduction of response action of the transformer of the reference sample coating depth on the support and exclusion of origination of the generated stray voltage.

EFFECT: the invention ensures the increased accuracy of the control and the decreased minimal controlled depth of the coatings, exclusion of origination of the generated stray voltage.

6 cl, 3 dwg