PROBE FOR NUCLEAR POWER MICROSCOPE Russian patent published in 2009 - IPC G12B21/08 B82B3/00 

Abstract RU 2356110 C2

FIELD: physics, optics.

SUBSTANCE: invention is related to the field of nuclear power microscopes and probes used in mentioned microscopes. Probe for application in nuclear power microscope or for nanolithography comprises force-measuring element connected to probe tip with tip radius of 100 nm or less. Force-measuring element has low coefficient of merit for at least one mode of force-measuring element oscillations, at that specified probe is arranged so that in case of action of force applied at probe from the outside, displacement force presses probe tip or sample, or both to each other with value that exceeds restoration force occurring as a result of probe tip shift in process of sample probing. Coefficient of merit may be reduced by plate coating with material that scatters mechanical energy.

EFFECT: improvement of sample surface tracing with probe, accelerated provision of scanned images.

30 cl, 12 dwg

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RU 2 356 110 C2

Authors

Khamfris Ehndrju Dehvid Lejver

Khobbs Dzhejmi Kejn

Majlz Mervin Dzhon

Dates

2009-05-20Published

2004-07-15Filed