METHOD AND DEVICE FOR MONITORING TECHNOLOGICAL PARAMETERS OF THE PROCESS OF FORMING HIGH-EFFICIENCY CATALYST ON ELECTRODES OF SOLID OXIDE FUEL CELLS Russian patent published in 2021 - IPC C23C14/54 G01B7/00 

FIELD: catalyst obtaining.

SUBSTANCE: invention relates to methods for controlling technological parameters and a device for its implementation. A method for controlling the technological parameters of the process of forming a high-efficiency catalyst on the electrodes of solid oxide fuel cells is described. The method includes placing the control sample together with the working substrates in the sputtering zone, sputtering the catalyst substance on the surfaces of the control sample and the working substrates that are in equal conditions, measuring the capacitance and resistance of the synthesized island structure of the catalyst on the control sample. The second control sample is placed in the vacuum chamber at a distance closer to the evaporator of substances by 10-20% of the distance to the first control sample and the working surfaces of the fuel cell electrodes. The catalyst is sputtered in two stages and the capacity and resistance of the synthesized island catalyst are measured and controlled simultaneously on two control samples. A device for monitoring the technological parameters of the process of forming a high-efficiency catalyst on the electrodes of solid oxide fuel cells is described. The device contains a vacuum chamber, a vacuum meter, an evaporator of substances, a control sample placed at the same level with the fuel cell electrodes from the evaporator, in which a second control sample is placed in the vacuum chamber at a distance closer to the evaporator of substances by 10-20% than to the first control sample and working substrates. On the first and second control samples, two groups of primary measuring transducers are placed in the form of copper strip electrodes of a counter-pin design.

EFFECT: control of obtaining a catalyst with the specified characteristics.

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