METHOD FOR SYNTHESIS OF NANOSTRUCTURE FILM ON ARTICLE AND APPARATUS FOR REALISING SAID METHOD Russian patent published in 2012 - IPC C23C14/54 C23C14/24 B82B3/00 G01B15/00 

FIELD: physics.

SUBSTANCE: synthesis method involves placing an article and reference samples in a vacuum chamber, heating and monitoring their temperature, and depositing a metallic material from an evaporator onto the article and reference samples. In the process of depositing material, reference samples are successively removed from the vacuum chamber using a linking device and phase composition, structure and thickness of the film deposited on each sample is determined using a transmission electron microscope. At least one of the following process parameters is then varied if necessary: heating temperature of the surface of the article and reference samples, atmospheric pressure in the working volume of the vacuum chamber, atmospheric composition, the value of current passing through the evaporator, distance between the evaporator and the surface of the article, composition of the evaporated material. Once a film of given structure, phase composition and thickness forms on the surface of the next reference sample, the process of depositing the material is stopped.

EFFECT: obtaining a nanostructure film with given parameters.

3 cl, 6 dwg, 2 tbl