FIELD: the invention refers to measuring technique.
SUBSTANCE: the arrangement for measuring small linear displacements has two phase diffraction gratings, a feeler, which is introduced into a contact with a research sample. In also has a system for transilluminating the gratings with a laser beam containing a laser with a beam collimator, a spacing filter, a photodiode and an output voltage meter. Besides diffraction gratings are marked on two opposite parallel sides of a transparent block. The block is fastened on an axle and has a rotating degree of freedom relatively to this axle and is connected with the feeler so that the vector of displacement impacting on the feeler passes at a certain distance from the axle of rotating of the block. The system for transilluminating of the gratings is installed on a separate turning foundation connected with a regulating mechanism.
EFFECT: excludes an angle misalignment of the diffraction gratings in the process of work, achievement of small pressure on the feeler at measuring linear displacement of a sensitive attachment of the sensor-the gratings' block.
1 dwg
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Authors
Dates
2006-06-10—Published
2004-12-06—Filed