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Application

99119799/28, 1999-09-15

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Start date

1999-09-15

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Actual filing date

1999-09-15

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Published

2000-10-27

(72)

Inventor

Leun E.V.Belovolov M.I.Zagrebel'Nyj V.E.Zhirkov A.O.Rybalko A.P.

(73)

Holder

Moskovskij Gosudarstvennyj Tekhnologicheskij Universitet

APPARATUS FOR DETERMINING DIMENSIONS OF PARTS Russian patent published in 2000 - IPC

Abstract RU 2158416 C1

FIELD: measuring technique, namely heterodyne laser interferometry, possibly for checking part dimensions. SUBSTANCE: apparatus includes three main units: unit for fixing boundary of part; movable stage and interferometer. Novelty is unit for determining boundary of part made with use of interference circuit and allowing with high accuracy to form in optical beam two "space-sensitive" coordinates. Motion of measured part on movable stage and its crossing with optical beam causes formation of two step pulses synchronizing signal measuring at output of motion interferometer. The last is realized according to Mach-Zender circuit with prism secured to movable stage. EFFECT: enhanced accuracy of measurements. 2 cl, 3 dwg

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RU 2 158 416 C1

Authors

Leun E.V.

Belovolov M.I.

Zagrebel'Nyj V.E.

Zhirkov A.O.

Rybalko A.P.

Dates

2000-10-27—Published

1999-09-15—Filed

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