FIELD: measuring technique, namely heterodyne laser interferometry, possibly for checking part dimensions. SUBSTANCE: apparatus includes three main units: unit for fixing boundary of part; movable stage and interferometer. Novelty is unit for determining boundary of part made with use of interference circuit and allowing with high accuracy to form in optical beam two "space-sensitive" coordinates. Motion of measured part on movable stage and its crossing with optical beam causes formation of two step pulses synchronizing signal measuring at output of motion interferometer. The last is realized according to Mach-Zender circuit with prism secured to movable stage. EFFECT: enhanced accuracy of measurements. 2 cl, 3 dwg
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Authors
Dates
2000-10-27—Published
1999-09-15—Filed