THERMALLY EXCITED MICRORESONATOR Russian patent published in 2006 - IPC H03H9/17 

FIELD: silicon resonators.

SUBSTANCE: proposed thermally excited microresonator has supporting frame and oscillatory body in the form of silicon beam incorporating resistive heater. Silicon beam is 5 - 10 mm in length, its ends are fixed integral with carrying frame but electrically insulated from the latter; it has sections of reduced cross-sectional area, 30 - 50 μm in width and 5 - 15 μm in thickness, at ends and in center that function as articulated joints, central of them functioning also as thermistor and piezoresistor. Silicon beam body is non-uniformly alloyed so that resistivity of its resistive part is 100 - 1000 times higher than that of its remaining part functioning as current leads with contact pads disposed on opposite ends of frame; two parts of beam having higher cross-sectional area are used as inertial masses which can be enlarged by attaching additional weight.

EFFECT: enhanced efficiency, enlarged frequency and wave amplitude range, enhanced sensitivity and precision of microresonator.

1 cl, 1 dwg