SENSITIVE ELEMENT OF GAS TRANSDUCER Russian patent published in 1996 - IPC

Abstract RU 2061225 C1

FIELD: gas transducers; measurement technology. SUBSTANCE: sensitive element of gas transducer has base with polymer coating, deposited onto the base. The coating may adsorb gas. Silicon microresonator is used as the base. EFFECT: improved efficiency of operation; improved precision.

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RU 2 061 225 C1

Authors

Gorshkov B.G.

Dorozhkin L.M.

Nunuparov M.S.

Tulajkova T.V.

Ugarov M.V.

Dates

1996-05-27Published

1993-06-28Filed