FIELD: measuring equipment.
SUBSTANCE: invention relates to measurement equipment, particularly to pressure converters, and can be used in designing and manufacturing miniature semiconductor pressure sensors. Pressure converter comprises silicon membrane (1) intended for pressure measurement, with silicon resonator (2) located thereon. Converter additionally comprises two permanent magnets (3) providing action of magnetic field in plane of resonator in a direction perpendicular to longitudinal axis of resonator (2). Resonator (2) is in form of an outer frame, inside which on links (4, 5) is suspended an oscillating element in form of internal frame (6) with sputtered on its surface along perimeter conducting path (7), which passes through one of links, and on other link there is a deformation converter consisting of arranged in pairs perpendicular on opposite edges of one side of link in zones of maximum compression and extension of four strain gauges (8), combined into a bridge circuit.
EFFECT: high sensitivity, high q-factor of oscillatory system and reduction of consumed power of converter.
1 cl, 5 dwg
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