DEVICE FOR EVAPORATION OF MATERIALS Russian patent published in 2006 - IPC C23C14/24 

Abstract RU 2283366 C1

FIELD: metallurgy; devices for evaporation of materials; mechanical engineering and instrumentation engineering.

SUBSTANCE: proposed device is provided with evaporation crucible for placing the material to be evaporated. Evaporation crucible is surrounded by evaporating pipe consisting of at least two heating loops running in longitudinal direction at definite distance from each other; these loops are independently electrically controlled. Each heating loop consists of at least two heating sub-loops located on opposite sides of evaporating pipe which has its own upper heating section.

EFFECT: extended capabilities of evaporator; improved quality of coat.

9 cl, 4 dwg

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RU 2 283 366 C1

Authors

Khajn Shtefan

Klemm Gjunter

Skuk Peter

Dates

2006-09-10Published

2005-01-20Filed