FIELD: metallurgy; devices for evaporation of materials; mechanical engineering and instrumentation engineering.
SUBSTANCE: proposed device is provided with evaporation crucible for placing the material to be evaporated. Evaporation crucible is surrounded by evaporating pipe consisting of at least two heating loops running in longitudinal direction at definite distance from each other; these loops are independently electrically controlled. Each heating loop consists of at least two heating sub-loops located on opposite sides of evaporating pipe which has its own upper heating section.
EFFECT: extended capabilities of evaporator; improved quality of coat.
9 cl, 4 dwg
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Authors
Dates
2006-09-10—Published
2005-01-20—Filed