FIELD: gas treatment techniques.
SUBSTANCE: method of treating gas emissions containing NF4 with admixtures of N2F4, HF, and OF2 comprises passing gas mixture through adsorbing substance, in particular activated carbon. Process is carried out at 150-200°C and contact time 6-10 sec.
EFFECT: enabled treatment of fluorine-containing gas emissions at considerably reduced power consumption and corrosive activity of reaction media.
1 tbl
| Title | Year | Author | Number |
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