METHOD FOR PRODUCING MONOSILANE AND DEVICE FOR IMPLEMENTING IT Russian patent published in 2015 - IPC C01B33/04 

FIELD: chemistry.

SUBSTANCE: invention can be used in chemical engineering. A method for producing monosilane involves carrying out a reaction of calcium hydride and silicone tetrafluoride in an eutectic melt of lithium and potassium chlorides at 360-390°C and purifying monosilane. A device for producing monosilane comprises a heated reactor for preparing the eutectic melt of lithium and potassium chlorides and dissolving calcium hydride therein. A monosilane (II) synthesis assembly consists in 10-15 reactors integrated into the same body. Each reactor is connected through a nozzle in its upper part to a dispensing nozzle group and to a common feeder, which is used to introduce the eutectic melt with dissolved calcium hydride. In the lower part, the reactors are provided with nozzles, which are used to connect through a discharge nozzle group to an eutectics filtration unit, whereas silicone tetrafluoride is introduced into each reactor through a flow meter.

EFFECT: invention enables increasing the device effectiveness, as well as producing high-purity monosilane containing the hydrogen fluoride impurity in an amount of less than 1 ppm, and the carbon monoxide, silicone tetrafluoride, methane impurities in the amount of less than 10 ppm.

2 cl, 1 dwg, 1 tbl