FIELD: acceleration measuring instruments.
SUBSTANCE: accelerometer includes housing where pendulum unit is arranged. Pendulum unit includes pendulum plate sensing member; supporting frame with basing members and elastic suspension, all formed of single chip of mono-crystalline silicon; magneto-electric pickup for measuring torque; intermediate flat insulation rings coaxially arranged at both sides relative to pendulum unit; capacitance pickup for detecting motion angle of pendulum plate sensing member also used as movable electrode of said pickup whose fixed electrodes are placed on intermediate flat insulation rings; compensation amplifier; capacitance pickup exciting voltage generator connected with electrodes of said pickup. According to invention attachment for assembling pendulum unit, magneto-electric torque pickup and intermediate insulation rings and for mounting them in housing of accelerometer is made of non-magnetic material. Elastic suspension includes two coaxial cross like members. Lengthwise axis of each cross-like member is oriented by angle 45° relative to crystallographic direction <110>. One restricting plane of cross like member is parallel to end plane (001) of pendulum unit and its other restricting plane is normal to end plane of (001) of pendulum unit.
EFFECT: possibility for measuring high acceleration values at improved accuracy.
7 cl, 8 dwg
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Authors
Dates
2007-01-10—Published
2005-05-26—Filed