FIELD: physics.
SUBSTANCE: group of inventions relates to the field of instrument making, namely to designs of pendulum compensation accelerometers. Device comprises pendulum assembly made of fused quartz or monocrystalline silicon, comprising a fixed frame with mounting plates formed on its opposite surfaces and a blade fixed in the frame by means of elastic suspension beams. On the surface of the blade electrodes of the capacitive angle sensor are sputtered and coils of the compensation torque sensor are fixed. Pendulum assembly is fixed between magnetic systems of compensation sensor, which simultaneously perform function of fixed electrodes of capacitive angle sensor. Mounting plates arranged on the frame form working gaps of the capacitive angle sensor and the gas damper plane. According to invention vane elastic suspension beams are free from sputtered on their surface of metal current leads, and the current leads from the capacitive angle sensor and the compensation torque sensor coils arranged on the contact area frame to the electrodes located on the blade are made in the form of flat free elastic beams arranged in parallel to the elastic suspension beams, so that neutral plane of pendulum suspension beams coincides with neutral plane of beams of free current leads attached to fixed element (frame) and to blade of pendulum.
EFFECT: simplified assembly of structural elements of the device.
7 cl, 18 dwg
Title | Year | Author | Number |
---|---|---|---|
PENDULUM COMPENSATION ACCELEROMETER | 2020 |
|
RU2795114C2 |
COMPENSATION PENDULOUS ACCELEROMETER | 2013 |
|
RU2543708C1 |
COMPENSATION PENDULUM TYPE ACCELEROMETER | 2005 |
|
RU2291450C1 |
COMPENSATORY PENDULOUS ACCELEROMETER | 0 |
|
SU1679395A1 |
COMPENSATION ACCELEROMETER | 1994 |
|
RU2126161C1 |
COMPENSATION PENDULOUS ACCELEROMETER | 1999 |
|
RU2155964C1 |
COMPENSATION PENDULUM ACCELEROMETER | 2021 |
|
RU2758892C1 |
ACCELEROMETER | 0 |
|
SU901914A1 |
MICROMECHANICAL VIBRATION GYROSCOPE | 2010 |
|
RU2485444C2 |
COMPENSATION ACCELEROMETER | 0 |
|
SU1067445A1 |
Authors
Dates
2020-09-07—Published
2019-03-15—Filed