FIELD: metallurgy, namely method for producing substrate of AlN, possibly manufacture of coated articles.
SUBSTANCE: substrate is produced by deposition of powder onto base at high temperature and high rate. Powder contains AlN grains coated with layer of oxide precursor selected from oxide precursors providing formation of liquid phase around AlN grains at deposition process. Invention allows make substrates with thickness 0.1 mm - 0.5 mm sufficient for operating at preset voltages.
EFFECT: improved quality of substrate of preset thickness value.
10 cl
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Authors
Dates
2007-02-10—Published
2003-09-25—Filed