GAS-DISCHARGE SOURCE OF ULTRA-VIOLET RADIATION Russian patent published in 2007 - IPC H01J61/02 

Abstract RU 2294034 C1

FIELD: instrument engineering.

SUBSTANCE: the device has a microwave oscillator coupled by a waveguide to a discharge capacitor made of a dielectric, as well as a capacitor for the processed medium having the shape of a cylindrical chamber provided with a quartz tube installed inside the capacitor for the processed medium coaxially without any clearance between them, and an antenna positioned in the device central axis. At least one electrodeless ultra-violet lamp positioned in the area between the antenna and the inner wall of the quartz tube is used as a discharge capacitor. When one electrodeless ultra-violet lamp is used, it has the shape of a toroid located inside the quartz tube coaxially with it, when two and more electrodeless ultra-violet lamps are used, they are located symmetrically in the area between the antenna and the inner wall of the quartz tube. A screen metal grid may be located between the inner wall of the quartz tube and the ultra-violet lamp. A fan switched on for suction may be used for temperature control.

EFFECT: enhanced reliability.

5 cl, 2 dwg

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RU 2 294 034 C1

Authors

Kossyj Igor' Antonovich

Barkhudarov Ehduard Mikhajlovich

Misakjan Mamikon Aramovich

Dates

2007-02-20Published

2005-10-26Filed