FIELD: analytical tool-making industry, in particular, analytical systems, in which determining of composition and properties of substances is performed on basis of energetic spectrums of charged particles extracted from aforementioned substances, and may be used for determining composition and properties of materials in various industrial branches and scientific research.
SUBSTANCE: analyzer of charged particles energy contains sample (emitting charged particles), external electrode and internal electrode with two circular slits and detecting system. Axial and radial gradients of energy analyzer field potential are synchronized along movement route of charged particles by setting appropriate configuration of equipotential surfaces of analyzer electrodes.
EFFECT: high resolution of energy analyzer at maximal possible light power.
8 cl, 1 dwg
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RU2427055C1 |
Authors
Dates
2007-02-27—Published
2005-06-17—Filed